Atom Probe Tomography of Carbides in Fe‐Cr‐(W)‐C Steels

Atom probe tomography in nanoelectronics

The role of laser assisted atom probe tomography (APT) in microelectronics is discussed on the basis of various illustrations related to SiGe epitaxial layers, bipolar transistors or MOS nano-devices including gate all around (GAA) devices that were carried out at the Groupe de Physique des Matériaux of Rouen (France). 3D maps as provided by APT reveal the atomic-scale distribution of dopants a...

Observations of decomposition of martensite during heat treatment of steels using atom probe tomography

The decomposition of martensite during tempering or ageing is an important phenomenon as it leads to changes in the mechanical properties. These changes could take place during both steel manufacturing or in-service. Thus, their understanding is required to predict the material performance. Recent advances in the development of local electrode atom probes has led to a significant increase in th...

Understanding Pressure Vessel Steels: An Atom Probe Perspective

Published Elsevier Science Inc. 1044-5803/00/$–see front matter 655 Avenue of the Americas, New York, NY 10010 PII S1044-5803(99)00056-X 235 Understanding Pressure Vessel Steels: An Atom Probe Perspective M. K. Miller,* P. Pareige,*† and M. G. Burke‡ *Microscopy and Microanalytical Sciences Group, Metals and Ceramics Division, Oak Ridge National Laboratory, Oak Ridge, TN 37831-6376; †Groupe de ...

Toward atom probe tomography of microelectronic devices

Atom Probe Tomography of Oxide Scales

Atom probe tomography, APT, is the only microstructural method that can routinely analyse and position individual atoms in a material with a spatial resolution of 0.1-0.5 nm. Recent implementation of pulsed-laser to APT made investigation of less conducting materials, such as oxides, feasible. In this paper a short description of the principle of the techniques is presented. It is followed by e...